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Device PORTA
Specifications
General:
S
tand-alone device
Dimensions:
1650
×
2050
×
3200 mm (W
×
H
× D
)
Process chamber:
Material: stainless steel
Volume: 720 liters
Dimensions: 900
×
900
×
900 mm (W
×
H
× D
)
Gas flow control:
Up to 7 automated mass flow controllers (MFC)
Energy input
:
R
adio frequency (RF):
Power up to
10 kW,
Frequency
13.56 MHz,
Automatic RF matching network,
water cooled electrode system
Security elements
:
I
nductive
door safety contacts,
Kill switch,
Applies to latest
CE norm
Control:
SPS with display, fully automated plasma process
Connection
:
Electrics:
Compressed air:
Process gas:
Power consumption
:
Water:
400 V, (L1, L2, L3, N, P), 50 Hz
6 bar,
fre
e of water and oil
1 to 2.5 bar
max. 15 kW
2 to 3 bar, 6 to 11 l/min
Vacuum pump:
Weight:
S
ystem consisting of
backing and main pump
Ca. 1000 kg, without vacuum pump
Options
PC control:
Network:
Visualization software and process diagrams
Network access and remote control
Contact
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