In Deutsch ansehen

Device PORTA

Specifications

General:
Stand-alone device
Dimensions: 1650 × 2050 × 3200 mm (W × H × D)
Process chamber:
Material: stainless steel
Volume: 720 liters
Dimensions: 900 × 900 × 900 mm (W × H × D)
Gas flow control:
Up to 7 automated mass flow controllers (MFC)
Energy input:
Radio frequency (RF):
Power up to 10 kW,
Frequency 13.56 MHz,
Automatic RF matching network,
water cooled electrode system
Security elements:
Inductive door safety contacts,
Kill switch,
Applies to latest CE norm
Control:
SPS with display, fully automated plasma process
Connection:
Electrics:
Compressed air:
Process gas:
Power consumption:
Water:
400 V, (L1, L2, L3, N, P), 50 Hz
6 bar, free of water and oil
1 to 2.5 bar
max. 15 kW
2 to 3 bar, 6 to 11 l/min
Vacuum pump:
Weight:
System consisting of backing and main pump
Ca. 1000 kg, without vacuum pump

Options

PC control:
Network:
Visualization software and process diagrams
Network access and remote control