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Device PICCOLO

Specifications

General:
Stand-alone device
Dimensions: 600 × 1900 × 800 mm (W × H × D)
Process chamber:
Material: stainless steel
Volume: 45 liters
Dimensions: 350 × 300 × 430 mm (W × H × D)
Gas flow control:
Up to 4 automated mass flow controllers (MFC)
Energy input:
3 alternatives:

Microwave:
Power up to 600 W,
Frequency 2.45 GHz,
PE GIGATRON© electrode systems

Radio frequency (RF):
Power up to 600 W,
Frequency 13.56 MHz,
Automatic RF matching network

Low Frequency (LF):
Power up to 600 W,
Frequency 10 to 300 kHz
Security elements:
Inductive door safety contacts,
Kill switch,
Applies to latest CE norm
Control:
SPS with display, fully automated plasma process
Connection:
Electrics:
Compressed air:
Process gas:
Power consumption:
Water:
400 V, 16 A, 50 Hz
6 bar, free of water and oil
1 to 1.5 bar
max. 2.5 kW
2 to 3 bar, 1 to 3 l/min
Vacuum pump:
Weight:
System consisting of backing and main pump
Ca. 200 kg, without pump

Options

Rotary drum inset:
Usable volume max. 5 liters
Network:
Network access and remote control