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PEALD 3D

Our PEALD 3D devices are used to coat 3D parts with the ALD 3D processes.

The maximum size for coatable parts is 150
× 150
× 150 mm. Depending on the size and shape of the parts we provide devices with a chamber volume of 10 or 20 liters.

Device PEALD 3D



PEALD 3D device with
20 liter chamber for
small-lot production, research and development.

Device PEALD 10L
PEALD device with a 10 liter chamber for flat substrates, research and development.

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© PLASMA ELECTRONIC GmbH                               info@plasma-electronic.de
Otto-Lilienthal-Straße 2, D-79395 Neuenburg, Phone: +49 (0)7631 7017-0, Fax: +49 (0)7631 7017–20
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