PEALD 3D
Our PEALD 3D devices are used to coat 3D parts with the ALD 3D processes.
The maximum size for coatable parts is 150 × 150 × 150 mm. Depending on the size and shape of the parts we provide devices with a chamber volume of 10 or 20 liters.
The maximum size for coatable parts is 150 × 150 × 150 mm. Depending on the size and shape of the parts we provide devices with a chamber volume of 10 or 20 liters.
PEALD 3D device with 20 liter chamber for small-lot production, research and development. |
PEALD device with a 10 liter chamber for flat substrates, research and development.
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