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Device DOMINO

Specifications

General:
Stand-alone device
Dimensions: 600 × 1900 × 800 mm (W × H × D)
Process chamber:
Material: stainless steel
Volume: 80 liters
Dimensions: 400 × 400 × 500 mm (W × H × D)
Gas flow control:
Up to 4 automated mass flow controllers (MFC)
Energy input:
3 alternatives:

Microwave:
Power up to 1000 W,
Frequency 2.45 GHz,
PE GIGATRON© electrode systems

 Radio frequency (RF):
Power up to 1200 W,
Frequency 13.56 MHz,
Automatic RF matching network

 Low Frequency (LF):
 Power up to 1250 W,
Frequency 10 to 300 kHz
Security elements:
Inductive door safety contacts,
Kill switch,
Applies to latest CE norm
Control:
SPS with display, fully automated plasma process
Connection:
Electrics:
Compressed air:
Process gas:
Power consumption:
Water:
400 V, 32 A, 50 Hz
6 bar, free of water and oil
1 to 1,5 bar
max. 5.5 kW
2 to 3 bar, 3 to 7 l/min
Vacuum pump:
Weight:
System consisting of backing and main pump
Ca. 280 kg, without vacuum pump

Options

Rotary drum
inset:
Usable volume max. 14 liters
Network:
Network access and remote control