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Device DOMINO
Specifications
General
:
S
tand-alone device
Dimensions:
600
×
1900
×
800 mm (W
×
H
× D
)
Process chamber:
Material: stainless steel
Volume: 80 liters
Dimensions: 400
×
400
×
500 mm (W
×
H
×
D)
Gas flow control
:
Up to 4
automated
mass flow controllers (MFC)
Energy input
:
3 alternativ
es:
Microwave:
Power up to
1000
W,
Frequency 2.45 GHz,
PE GIGATRON© electrode systems
Radio frequency (RF):
Power up to
1200
W,
Frequency
13.56 MHz,
Automatic RF
matching network
Low Frequency (LF):
Power
up to
1250
W,
Frequency
10 to 300 kHz
Security elements
:
Inductive
door safety contacts,
Kill switch,
Applies to latest
CE norm
Control:
SPS with display, fully automated plasma process
Connection
:
Electrics:
Compressed air
:
Process gas:
Power consumption
:
Water:
400 V, 32 A, 50 Hz
6 bar,
fre
e of water and oil
1 to 1,5 bar
max. 5.5 kW
2 to 3 bar, 3 to 7 l/min
Vacuum pump:
Weight:
System consisting of
backing and main pump
Ca. 280 kg, without vacuum pump
Options
Rotary drum
inset
:
Usable volume max. 14 liters
Network:
Network access and remote control
Contact
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